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Fundamentals of microfabrication : the science of miniturization

Author: Marc J Madou
Publisher: Boca Raton : CRC Press, ©2007.
Edition/Format:   Print book : English : 2nd edView all editions and formats
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Document Type: Book
All Authors / Contributors: Marc J Madou
ISBN: 9780849308260 0849308267
OCLC Number: 849032148
Description: 723 p. ; 29 cm
Responsibility: Marc Madou.

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