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Handbook of vacuum science and technology

Author: Dorothy M Hoffman; Bawa Singh; John H Thomas, III.
Publisher: San Diego, CA : Academic Press, ©1998.
Edition/Format:   eBook : Document : EnglishView all editions and formats
Summary:
The Handbook of Vacuum Technology consists of the latest innovations in vacuum science and technology with a strong orientation towards the vacuum practitioner. It covers many of the new vacuum pumps, materials, equipment, and applications. It also details the design and maintenance of modern vacuum systems. The authors are well known experts in their individual fields with the emphasis on performance, limitations,  Read more...
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Genre/Form: Electronic book
Electronic books
Handbooks and manuals
Handbooks, manuals, etc
Additional Physical Format: Print version:
Handbook of vacuum science and technology.
San Diego, CA : Academic Press, ©1998
(DLC) 97026269
(OCoLC)37211296
Material Type: Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Dorothy M Hoffman; Bawa Singh; John H Thomas, III.
ISBN: 9780080533759 0080533752 1281059358 9781281059352 9786611059354 6611059350
OCLC Number: 162128757
Language Note: English.
Reproduction Notes: Electronic reproduction. [S.l.] : HathiTrust Digital Library, 2010. MiAaHDL
Description: 1 online resource (xxii, 835 pages) : illustrations
Details: Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002.
Contents: Preface. Fundamentals of Vacuum Technology and Surface Physics: B. Singh and J.H. Thomas, III, Vacuum Nomenclature and Definitions. Gas Properties. Molecular Processes and Kinetic Theory. Throughput, Pumping Speed, Evacuation Rate, Outgassing Rate, and Leak Rate. Gas Flow. Conductance. Flow Calculations. Surface Physics and Its Relation to Vacuum Science. Creation of Vacuum: M. Hablanian, The Technology of Vacuum Pumps--An Overview. F.J. Eckle, Diaphragm Pumps. J. Richman, Blowers. Vapor Jet Pumps: M. Hablanian, Diffusion Pumps. G. Ash, Cryogenic Pumps. H. Henning, Turbomolecular Pumps. J. Singleton, UHV Pumps. Vacuum Measurements: H.M. Brady, R.H. Goehner, E. Drubetsky, and W.H. Bayles, Jr., Measurements of Pressure. L. Lieszkovszky, Mass Analysis and Partial Pressure Measurement. R. Outlaw, Analysis of Partial Pressure Information. L. Hinkle, Gas Flow Measurements. Systems Design and Components: Components for Vacuum Equipment and Systems: N.T. Peacock, Valves. N.T. Peacock, Flanges. W. Helgeland, Feedthroughs. C. Kraft, Ports. J. Panitz, Construction Materials: Properties Defining Material Performance. Vacuum Chamber Materials. Special Purpose Materials. R.N. Peacock, Seal Materials and Design. B. Dayton, Outgassing of Materials. J. Garner, Aluminum Based Vacuum Systems. D. Mattox, Preparation and Cleaning of Vacuum Surfaces. Vacuum Applications: High Vacuum Based Processes: S. Rossnagel, Sputtering. V. Patel, Plasma Etching. M. Powers, Ion Beam Based Processes. J. Cheung, Laser Ablation. F. Jansen, CVD and PECVD. J. Thomas, UHV Based Processes. Large-Scale Vacuum Based Processes: W. Robbins, Large Area Coatings. H.F. Dylla, The Development of Ultrahigh Vacuum Technology for Particle Accelerators and Magnetic Fusion Devices.
Responsibility: edited by Dorothy M. Hoffman, Bawa Singh, John H. Thomas, III.
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Abstract:

Consisting of the innovations in vacuum science and technology, this book covers many vacuum pumps, materials, equipment, and applications. It also details the design and maintenance of modern vacuum  Read more...

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\n\n

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Hoffman<\/span>\n\u00A0\u00A0\u00A0\nschema:contributor<\/a> <http:\/\/viaf.org\/viaf\/23148704210936932329<\/a>> ; # III. John H. Thomas<\/span>\n\u00A0\u00A0\u00A0\nschema:contributor<\/a> <http:\/\/viaf.org\/viaf\/18561768<\/a>> ; # Bawa Singh<\/span>\n\u00A0\u00A0\u00A0\nschema:copyrightYear<\/a> \"1998<\/span>\" ;\u00A0\u00A0\u00A0\nschema:datePublished<\/a> \"1998<\/span>\" ;\u00A0\u00A0\u00A0\nschema:description<\/a> \"Preface. Fundamentals of Vacuum Technology and Surface Physics: B. Singh and J.H. Thomas, III, Vacuum Nomenclature and Definitions. Gas Properties. Molecular Processes and Kinetic Theory. Throughput, Pumping Speed, Evacuation Rate, Outgassing Rate, and Leak Rate. Gas Flow. Conductance. Flow Calculations. Surface Physics and Its Relation to Vacuum Science. Creation of Vacuum: M. Hablanian, The Technology of Vacuum Pumps--An Overview. F.J. Eckle, Diaphragm Pumps. J. Richman, Blowers. Vapor Jet Pumps: M. Hablanian, Diffusion Pumps. G. Ash, Cryogenic Pumps. H. 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