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High-silica-zeolite BEA spin-on low-k dielectric films for future generation computer chips

Author: Dora Iliana Medina
Publisher: 2005.
Dissertation: M.S. University of California, Riverside 2005
Edition/Format:   Thesis/dissertation : Thesis/dissertation : Manuscript   Archival Material : English
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Genre/Form: Academic theses
Dissertations, Academic
Material Type: Thesis/dissertation, Manuscript
Document Type: Book, Archival Material
All Authors / Contributors: Dora Iliana Medina
OCLC Number: 62770463
Description: xi, 43 leaves : illustrations ; 28 cm
Responsibility: by Dora Iliana Medina.

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