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Interaction of ions with condensed matter

Author: Arvaidas Galdikas; Liudvikas Pranevičius
Publisher: Huntington, NY Nova Science Publ. c 2000
Edition/Format:   Print book : EnglishView all editions and formats
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Material Type: Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: Arvaidas Galdikas; Liudvikas Pranevičius
ISBN: 1560726660 9781560726661
OCLC Number: 245840642
Notes: Nebensacht.: Interactions of ions with condensed matter
Description: 176 Seiten Illustrationen, Diagramme 27 cm
Contents: Contents: Sputtering of Monoelemental Solids -- Ion Energy Losses; Collision Cascades; Physical Sputtering. Sputtering of Multielement Solids -- Preferential Sputtering; Modelling of Preferential Sputtering. Formation of the Altered Layer -- Collisional Mixing; Modelling of Collisional Mixing; Thermal Diffusion; Radiation Enhanced Diffusion; Radiation Enhanced Diffusion and Sputtering; Preferential Sputtering and Interdiffusion; Radiation Activated Temperature Gradient Diffusion; Segregation. Surface Topography -- Development of Surface Roughness; Roughening Effects on Ion Beam Profiling of Multilayers; Modelling of Sputtering of Multilayers. Heterogeneous Processes in Reactive Plasma -- Plasmochemical Etching; Model of Etching Kinetics; Etching Profiles; Modelling of Etching Through a Mask.
Other Titles: Interactions of ions with condensed matter
Responsibility: A. Galdikas and L. Praneviéus [i.e. Pranevièius]

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