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Introduction to microelectronic fabrication

Author: Richard C Jaeger
Publisher: Reading, Mass. : Addison-Wesley Pub. Co., ©1988.
Series: Modular series on solid state devices, v. 5.
Edition/Format:   Print book : EnglishView all editions and formats
Summary:

Modular Series on Solid State Devices. This volume is a concise survey of the most up-to-date techniques in the field. It is devoted excusively to processing and its highlighted by careful  Read more...

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Genre/Form: Textbooks
Material Type: Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: Richard C Jaeger
ISBN: 0201146959 9780201146950
OCLC Number: 14214933
Description: xiii, 232 pages : illustrations ; 24 cm.
Series Title: Modular series on solid state devices, v. 5.
Responsibility: Richard C. Jaeger.

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