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Ion implantation technology--2000 : 2000 International Conference on Ion Implantation Technology : proceedings : Alpbach, Austria, 17-22 September, 2000

Author: Heiner Ryssel; et al
Publisher: Piscataway, New Jersey : IEEE, ©2000.
Edition/Format:   eBook : Document : Conference publication : EnglishView all editions and formats
Summary:

These papers are from the International Conference on Ion Implantation Technology, 2000. They discuss: process control; safety and environment; implanted systems; ion solid interactions; emerging  Read more...

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Additional Physical Format: Print version:
International Conference on Ion Implantation Technology (13th : 2000 : Alpbach, Austria).
Ion implantation technology--2000.
Piscataway, New Jersey : IEEE, ©2000
(DLC) 00003972
Material Type: Conference publication, Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Heiner Ryssel; et al
ISBN: 0780364627 9780780364622
OCLC Number: 928804789
Notes: "IEEE Catalog Number 00EX432"--Title page verso.
Conference number inferred.
Libros electrónicos descargables.
Description: 1 online resource (xxvi, 829 p.) : ill. (some color)
Contents: Process Control; Safety and Environment; Implanted Systems; Ion Solid Interactions; Emerging Techniques & Processes; Processing & Devices; Annealing.
Other Titles: IEEE Proceedings (Servicio en línea)
Ion Implantation Technology, 2000, Conference on.
2000 International Conference on Ion Implantation Technology
IIT 2000
Responsibility: editors, Heiner Ryssel ... [et al.].

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