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Journal of vacuum science and technology JVST ; an AVS journal. B Nanotechnology & microelectronics : materials, processing, measurement, & phenomena

Author: American Vacuum Society,
Publisher: New York, NY Inst. 1983-
Edition/Format:   Journal, magazine : Periodical : EnglishView all editions and formats
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Genre/Form: Zeitschrift
Additional Physical Format: Online-Ausg.
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena.
New York, NY : Inst., 1983-
Online-Ressource
(DE-603)072477113
(DE-600)1475429-0
CD-ROM-Ausg.
Journal of vacuum science & technology. A & B.
New York, NY : Inst., 2011-2013
CD-ROMs
(DE-603)306597446
(DE-600)2676899-9
Material Type: Periodical
Document Type: Journal / Magazine / Newspaper
All Authors / Contributors: American Vacuum Society,
ISSN:1071-1023, 0734-211X, 2166-2746
OCLC Number: 263603465
Notes: 1. Zusatz ab 2. Ser. 12.1994
Other Titles: Journal of vacuum science and technology / B
JVST
Responsibility: publ. by the Society through the American Institute of Physics

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