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The journal of vacuum science and technology

Author: American vacuum society.
Publisher: New York, N.Y. : published for the American vacuum society by the American institute of physics(IS), New York, N.Y. : American institute of physics 1964-1982
Edition/Format:   Journal, magazine : English
Database:WorldCat
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Document Type: Journal / Magazine / Newspaper
All Authors / Contributors: American vacuum society.
ISSN:0022-5355
OCLC Number: 797787184
Notes: Tit.: 1973-: Journal of vacuum science & technology.
Description: 18 v. graf., tab. num. 29 cm.
Other Titles: Journal of vacuum science & technology
Responsibility: published for the American vacuum society by the American institute of physics.

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