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MEMS : a practical guide to design, analysis, and applications

Author: J G Korvink; Oliver Paul
Publisher: Norwich, NY : W. Andrew Pub. : Heidelberg, Germany : Springer, ©2006.
Edition/Format:   eBook : Document : English
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Material Type: Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: J G Korvink; Oliver Paul
ISBN: 0815514972 9780815514978 3540211179 9783540211174
OCLC Number: 1162653595
Notes: "Micro-electro-mechanical systems"--Cover.
Description: 1 online resource (xxv, 965 p. :) ill.
Responsibility: edited by Jan G. Korvink and Oliver Paul.

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