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MEMS and microsystems : design and manufacture

Author: Tai-Ran Hsu
Publisher: Boston : McGraw-Hill, ©2002.
Edition/Format:   Print book : EnglishView all editions and formats
Summary:

Provides a comprehensive overview of MEMS and microsystems for engineering students. This book presents background information needed to understand microtechnologies, including solid mechanics,  Read more...

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Additional Physical Format: Online version:
Hsu, Tai-Ran.
MEMS and microsystems.
Boston : McGraw-Hill, ©2002
(OCoLC)606625978
Online version:
Hsu, Tai-Ran.
MEMS and microsystems.
Boston : McGraw-Hill, ©2002
(OCoLC)632068825
Material Type: Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: Tai-Ran Hsu
ISBN: 0072393912 9780072393910 0071130519 9780071130516 9780071204767 0071204768
OCLC Number: 47893369
Description: xii, 436 pages : illustrations ; 24 cm
Contents: Ch. 1. Overview of MEMS and Microsystems --
Ch. 2. Working Principles of Microsystems --
Ch. 3. Engineering Science for Microsystem Design and Fabrication --
Ch. 4. Engineering Mechanics for Microsystems Design --
Ch. 5. Thermofluid Engineering and Microsystem Design --
Ch. 6. Scaling Laws in Miniaturization --
Ch. 7. Materials for MEMS and Microsystems --
Ch. 8. Microsystem Fabrication Processes --
Ch. 9. Overview of Micromanufacturing --
Ch. 10. Microsystems Design --
Ch. 11. Microsystem Packaging.
Responsibility: Tai-Ran Hsu.
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