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MEMS and MOEMS Technology and Applications.

Author: Prosenjit Rai-Choudhury
Publisher: [Place of publication not identified] : SPIE_Society of Photo-Optical Instrumentation Engineers : Society of Photo-Optical Instrumentation Engineers (SPIE), 2017.
Edition/Format:   eBook : Document : EnglishView all editions and formats
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Genre/Form: Electronic books
Material Type: Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Prosenjit Rai-Choudhury
ISBN: 9781510607941 1510607943
OCLC Number: 1004739090
Description: 1 online resource.

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