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MEMS & microsystems : design and manufacture

Author: Tai-Ran Hsu
Publisher: Boston : McGraw-Hill, ©2002.
Edition/Format:   Print book : EnglishView all editions and formats
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Document Type: Book
All Authors / Contributors: Tai-Ran Hsu
ISBN: 0072393912 9780072393910
OCLC Number: 1008837902
Description: xii, 436 pages : illustrations ; 24 cm
Other Titles: MEMS and microsystems
Responsibility: Tai-Ran Hsu.

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