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Methods and materials in microelectronic technology

Author: Joachim Bargon
Publisher: New York : Plenum Press, ©1984.
Series: IBM research symposia series.
Edition/Format:   Print book : Conference publication : EnglishView all editions and formats
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Genre/Form: Conference papers and proceedings
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Congrès
Additional Physical Format: Online version:
International Symposium on Methods and Materials in Microelectronic Technology (1982 : Bad Neuenahr-Ahrweiler, Germany).
Methods and materials in microelectronic technology.
New York : Plenum Press, ©1984
(OCoLC)563658970
Online version:
International Symposium on Methods and Materials in Microelectronic Technology (1982 : Bad Neuenahr-Ahrweiler, Germany).
Methods and materials in microelectronic technology.
New York : Plenum Press, ©1984
(OCoLC)606231973
Material Type: Conference publication
Document Type: Book
All Authors / Contributors: Joachim Bargon
ISBN: 0306418037 9780306418037
OCLC Number: 10913539
Notes: "Proceedings of the International Symposium on Methods and Materials in Microelectronic Technology, held September 29-October 1, 1982, in Bad Neuenahr, Federal Republic of Germany"--Title page verso.
Description: viii, 367 pages : illustrations ; 26 cm.
Series Title: IBM research symposia series.
Other Titles: Microelectronic technology.
Responsibility: edited by Joachim Bargon.

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