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Metrology, Inspection, and Process Control for Microlithography XXXI

Author: Martha Sánchez; SPIE (Society)
Publisher: Bellingham, Washington : SPIE, [2017] copyright 2017
Series: Proceedings of SPIE--the International Society for Optical Engineering, v. 10145.
Edition/Format:   eBook : Document : Conference publication : EnglishView all editions and formats
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Proceedings of SPIE offer access to the latest innovations in research and technology and are among the most cited references in patent literature.

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Genre/Form: Electronic book
Material Type: Conference publication, Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Martha Sánchez; SPIE (Society)
OCLC Number: 1004382907
Description: 1 online resource : illustrations
Series Title: Proceedings of SPIE--the International Society for Optical Engineering, v. 10145.
Responsibility: Martha Sanchez.

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