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Micro and nano fabrication technology

Author: Jiwang Yan
Publisher: Singapore : Springer, [2018]
Series: Micro/nano technologies, 1.
Edition/Format:   eBook : Document : EnglishView all editions and formats
Publication:Springer Nature Living Reference
Summary:
"Updated content will continue to be published as 'Living Reference Works'"--Publisher.
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Genre/Form: Electronic books
Material Type: Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Jiwang Yan
ISBN: 9789811065880 9811065888
OCLC Number: 1106166938
Description: 1 online resource
Contents: Material Physics --
Pattern design and transformation: Lithography --
Process simulation --
Metalization --
Deposition --
Wet etching --
Dry etching --
Assembly and packaging --
Laser micro and nanofabrication --
Nanomachining.
Series Title: Micro/nano technologies, 1.
Responsibility: editors, Jiwang Yan.

Abstract:

"Updated content will continue to be published as 'Living Reference Works'"--Publisher.

This volume focuses on the state-of-the-art micro/nanofabrication technologies for creating miniature structures with high precision. These multidisciplinary technologies include mechanical, electrical, optical, physical, and chemical methods, as well as hybrid processes, covering subtractive and additive material manufacturing, as well as net-shape manufacturing. The materials the volume deals with include metals, alloys, semiconductors, polymers, crystals, glass, ceramics, composites, and nanomaterials. The volume is composed of 30 chapters, which are grouped into five parts. Engaging with the latest research in the field, these chapters provide important perspectives on key topics, from process developments at the shop level to scientific investigations at the academic level, offering both experimental work and theoretical analysis. Moreover, the content of this volume is highly interdisciplinary in nature, with insights from not only manufacturing technology but also mechanical/mat erial science, optics, physics, chemistry, and more.

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