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Microelectronics manufacturing and reliability : 21-22 September 1992, San Jose, California

Author: Barbara Vasquez; Society of Photo-optical Instrumentation Engineers.
Publisher: Bellingham, Wash. : Society of Photo-optical Instrumentation Engineers, ©1993.
Series: Proceedings of SPIE--the International Society for Optical Engineering, v. 1802.
Edition/Format:   Print book : Conference publication : EnglishView all editions and formats
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Genre/Form: Conference papers and proceedings
Congresses
Additional Physical Format: Online version:
Microelectronics manufacturing and reliability.
Bellingham, Wash. : SPIE, ©1993
(OCoLC)624396355
Material Type: Conference publication, Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: Barbara Vasquez; Society of Photo-optical Instrumentation Engineers.
ISBN: 0819410004 9780819410009
OCLC Number: 27402371
Notes: "Part of SPIE's Microelectronic Processing '92 Symposium"--Page ix.
Description: x, 258 pages : illustrations ; 28 cm.
Contents: Design for manufacturability and reliability --
Built-in reliability by controlling defects --
Failure analysis and techniques --
Device degradation and stress testing --
Semiconductor device performance and reliability.
Series Title: Proceedings of SPIE--the International Society for Optical Engineering, v. 1802.
Responsibility: Barbara Vasquez [and others], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.

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