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Micromechanics and MEMS : classic and seminal papers to 1990

Author: W Trimmer; Institute of Electrical and Electronics Engineers.
Publisher: New York : IEEE Press, 1997.
Edition/Format:   Print book : EnglishView all editions and formats
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Additional Physical Format: Online version:
Micromechanics and MEMS.
New York : IEEE Press, 1997
(OCoLC)605157691
Online version:
Micromechanics and MEMS.
New York : IEEE Press, 1997
(OCoLC)608161818
Material Type: Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: W Trimmer; Institute of Electrical and Electronics Engineers.
ISBN: 0780310853 9780780310858
OCLC Number: 35223064
Notes: "A selected reprint volume."
Description: xv, 701 pages : illustrations ; 29 cm
Contents: Early papers in micromechanics --
Side drive actuators --
Comb drive actuators --
Electrostatic actuators --
Magnetic actuators --
Harmonic motors --
Other actuators : Thermal ; Shape memory alloy ; Impact ; Piezoelectric --
Values and pumps --
Fluidics --
Surface micromachining --
Bulk micromachining --
LIGA --
Computer aided design --
Metrology.
Responsibility: edited by William S. Trimmer.
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