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Micro/Nanolithography : a heuristic aspect on the dnduring technology

Author: Jagannathan Thirumalai
Publisher: London IntechOpen May 2018
Edition/Format:   Computer file : English
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Additional Physical Format: Erscheint auch als:
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Material Type: Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Jagannathan Thirumalai
ISBN: 9781789230314 1789230314
OCLC Number: 1057674261
Description: 1 Online-Ressource : Illustrationen
Responsibility: edited by Jagannathan Thirumalai.

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