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Mikro-System-Technik Chemnitz '03 : Mikromechanik & Mikroelektronik ; 6. Chemnitzer Fachtagung Mikromechanik & Mikroelektronik, 29./30. Oktober 2003

Author: Wolfram Dötzel; Technische Universität Chemnitz
Publisher: Chemnitz Techn. Univ. 2003
Edition/Format:   Print book : GermanView all editions and formats
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Material Type: Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: Wolfram Dötzel; Technische Universität Chemnitz
ISBN: 3000116559 9783000116551
OCLC Number: 249217750
Language Note: Beitr. teilw. dt., teilw. engl.
Notes: Mikrosystemtechnik
Description: VIII, 218 Seiten Illustrationen, Diagramme 30 cm
Responsibility: Technische Universität Chemnitz. [Programmkomitee: W. Dötzel ...]

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