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Plasma synthesis and etching of electronic materials : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A. Preview this item
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Plasma synthesis and etching of electronic materials : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.

Author: R P H Chang; B Abeles
Publisher: Pittsburgh, Pa. : Materials Research Society, ©1985.
Series: Materials Research Society symposia proceedings, v. 38.
Edition/Format:   Print book : Conference publication : EnglishView all editions and formats
Summary:

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

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Genre/Form: Conference papers and proceedings
Congresses
Additional Physical Format: Online version:
Plasma synthesis and etching of electronic materials.
Pittsburgh, Pa. : Materials Research Society, ©1985
(OCoLC)654671618
Material Type: Conference publication, Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: R P H Chang; B Abeles
ISBN: 0931837030 9780931837036
OCLC Number: 11784552
Notes: Papers presented at the Symposium on Plasma Synthesis and Etching of Electronic Materials held in Boston, Mass. on Nov. 27-30, 1984.
Description: xv, 522 pages : illustrations ; 24 cm.
Series Title: Materials Research Society symposia proceedings, v. 38.
Responsibility: editors, R.P.H. Chang, B. Abeles.

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Primary Entity<\/h3>\n
<http:\/\/www.worldcat.org\/oclc\/11784552<\/a>> # Plasma synthesis and etching of electronic materials : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.<\/span>\n\u00A0\u00A0\u00A0\u00A0a \nschema:Book<\/a>, schema:CreativeWork<\/a> ;\u00A0\u00A0\u00A0\nlibrary:oclcnum<\/a> \"11784552<\/span>\" ;\u00A0\u00A0\u00A0\nlibrary:placeOfPublication<\/a> <http:\/\/experiment.worldcat.org\/entity\/work\/data\/4620662#Place\/pittsburgh_pa<\/a>> ; # Pittsburgh, Pa.<\/span>\n\u00A0\u00A0\u00A0\nlibrary:placeOfPublication<\/a> <http:\/\/id.loc.gov\/vocabulary\/countries\/pau<\/a>> ;\u00A0\u00A0\u00A0\nschema:about<\/a> <http:\/\/id.worldcat.org\/fast\/1066322<\/a>> ; # Plasma engineering<\/span>\n\u00A0\u00A0\u00A0\nschema:about<\/a> <http:\/\/id.worldcat.org\/fast\/907562<\/a>> ; # Electronics--Materials<\/span>\n\u00A0\u00A0\u00A0\nschema:about<\/a> <http:\/\/experiment.worldcat.org\/entity\/work\/data\/4620662#Topic\/plasma_etching<\/a>> ; # Plasma etching<\/span>\n\u00A0\u00A0\u00A0\nschema:about<\/a> <http:\/\/experiment.worldcat.org\/entity\/work\/data\/4620662#Topic\/plasma_engineering<\/a>> ; # Plasma engineering<\/span>\n\u00A0\u00A0\u00A0\nschema:about<\/a> <http:\/\/dewey.info\/class\/621.044\/e19\/<\/a>> ;\u00A0\u00A0\u00A0\nschema:about<\/a> <http:\/\/experiment.worldcat.org\/entity\/work\/data\/4620662#Topic\/electronics_materials<\/a>> ; # Electronics--Materials<\/span>\n\u00A0\u00A0\u00A0\nschema:about<\/a> <http:\/\/id.worldcat.org\/fast\/1066327<\/a>> ; # Plasma etching<\/span>\n\u00A0\u00A0\u00A0\nschema:bookFormat<\/a> bgn:PrintBook<\/a> ;\u00A0\u00A0\u00A0\nschema:contributor<\/a> <http:\/\/experiment.worldcat.org\/entity\/work\/data\/4620662#Meeting\/symposium_on_plasma_synthesis_and_etching_of_electronic_materials_1984_boston_mass<\/a>> ; # Symposium on Plasma Synthesis and Etching of Electronic Materials (1984 : Boston, Mass.)<\/span>\n\u00A0\u00A0\u00A0\nschema:contributor<\/a> <http:\/\/viaf.org\/viaf\/30956163<\/a>> ; # B. Abeles<\/span>\n\u00A0\u00A0\u00A0\nschema:contributor<\/a> <http:\/\/viaf.org\/viaf\/55452443<\/a>> ; # Robert Pang Heng Chang<\/span>\n\u00A0\u00A0\u00A0\nschema:copyrightYear<\/a> \"1985<\/span>\" ;\u00A0\u00A0\u00A0\nschema:datePublished<\/a> \"1985<\/span>\" ;\u00A0\u00A0\u00A0\nschema:exampleOfWork<\/a> <http:\/\/worldcat.org\/entity\/work\/id\/4620662<\/a>> ;\u00A0\u00A0\u00A0\nschema:genre<\/a> \"Conference publication<\/span>\"@en<\/a> ;\u00A0\u00A0\u00A0\nschema:genre<\/a> \"Conference papers and proceedings<\/span>\"@en<\/a> ;\u00A0\u00A0\u00A0\nschema:inLanguage<\/a> \"en<\/span>\" ;\u00A0\u00A0\u00A0\nschema:isPartOf<\/a> <http:\/\/experiment.worldcat.org\/entity\/work\/data\/4620662#Series\/materials_research_society_symposia_proceedings<\/a>> ; # Materials Research Society symposia proceedings ;<\/span>\n\u00A0\u00A0\u00A0\nschema:isSimilarTo<\/a> <http:\/\/www.worldcat.org\/oclc\/654671618<\/a>> ;\u00A0\u00A0\u00A0\nschema:name<\/a> \"Plasma synthesis and etching of electronic materials : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.<\/span>\"@en<\/a> ;\u00A0\u00A0\u00A0\nschema:productID<\/a> \"11784552<\/span>\" ;\u00A0\u00A0\u00A0\nschema:publication<\/a> <http:\/\/www.worldcat.org\/title\/-\/oclc\/11784552#PublicationEvent\/pittsburgh_pa_materials_research_society_1985<\/a>> ;\u00A0\u00A0\u00A0\nschema:publisher<\/a> <http:\/\/experiment.worldcat.org\/entity\/work\/data\/4620662#Agent\/materials_research_society<\/a>> ; # Materials Research Society<\/span>\n\u00A0\u00A0\u00A0\nschema:url<\/a> <http:\/\/journals.cambridge.org\/mrsopl_38<\/a>> ;\u00A0\u00A0\u00A0\nschema:workExample<\/a> <http:\/\/worldcat.org\/isbn\/9780931837036<\/a>> ;\u00A0\u00A0\u00A0\nwdrs:describedby<\/a> <http:\/\/www.worldcat.org\/title\/-\/oclc\/11784552<\/a>> ;\u00A0\u00A0\u00A0\u00A0.\n\n\n<\/div>\n\n

Related Entities<\/h3>\n
<http:\/\/dewey.info\/class\/621.044\/e19\/<\/a>>\u00A0\u00A0\u00A0\u00A0a \nschema:Intangible<\/a> ;\u00A0\u00A0\u00A0\u00A0.\n\n\n<\/div>\n
<http:\/\/experiment.worldcat.org\/entity\/work\/data\/4620662#Agent\/materials_research_society<\/a>> # Materials Research Society<\/span>\n\u00A0\u00A0\u00A0\u00A0a \nbgn:Agent<\/a> ;\u00A0\u00A0\u00A0\nschema:name<\/a> \"Materials Research Society<\/span>\" ;\u00A0\u00A0\u00A0\u00A0.\n\n\n<\/div>\n
<http:\/\/experiment.worldcat.org\/entity\/work\/data\/4620662#Meeting\/symposium_on_plasma_synthesis_and_etching_of_electronic_materials_1984_boston_mass<\/a>> # Symposium on Plasma Synthesis and Etching of Electronic Materials (1984 : Boston, Mass.)<\/span>\n\u00A0\u00A0\u00A0\u00A0a \nbgn:Meeting<\/a>, schema:Event<\/a> ;\u00A0\u00A0\u00A0\nschema:location<\/a> <http:\/\/experiment.worldcat.org\/entity\/work\/data\/4620662#Place\/boston_mass<\/a>> ; # Boston, Mass.)<\/span>\n\u00A0\u00A0\u00A0\nschema:name<\/a> \"Symposium on Plasma Synthesis and Etching of Electronic Materials (1984 : Boston, Mass.)<\/span>\" ;\u00A0\u00A0\u00A0\u00A0.\n\n\n<\/div>\n
<http:\/\/experiment.worldcat.org\/entity\/work\/data\/4620662#Place\/boston_mass<\/a>> # Boston, Mass.)<\/span>\n\u00A0\u00A0\u00A0\u00A0a \nschema:Place<\/a> ;\u00A0\u00A0\u00A0\nschema:name<\/a> \"Boston, Mass.)<\/span>\" ;\u00A0\u00A0\u00A0\u00A0.\n\n\n<\/div>\n
<http:\/\/experiment.worldcat.org\/entity\/work\/data\/4620662#Place\/pittsburgh_pa<\/a>> # Pittsburgh, Pa.<\/span>\n\u00A0\u00A0\u00A0\u00A0a \nschema:Place<\/a> ;\u00A0\u00A0\u00A0\nschema:name<\/a> \"Pittsburgh, Pa.<\/span>\" ;\u00A0\u00A0\u00A0\u00A0.\n\n\n<\/div>\n
<http:\/\/experiment.worldcat.org\/entity\/work\/data\/4620662#Series\/materials_research_society_symposia_proceedings<\/a>> # Materials Research Society symposia proceedings ;<\/span>\n\u00A0\u00A0\u00A0\u00A0a \nbgn:PublicationSeries<\/a> ;\u00A0\u00A0\u00A0\nschema:hasPart<\/a> <http:\/\/www.worldcat.org\/oclc\/11784552<\/a>> ; # Plasma synthesis and etching of electronic materials : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.<\/span>\n\u00A0\u00A0\u00A0\nschema:name<\/a> \"Materials Research Society symposia proceedings ;<\/span>\" ;\u00A0\u00A0\u00A0\u00A0.\n\n\n<\/div>\n
<http:\/\/experiment.worldcat.org\/entity\/work\/data\/4620662#Topic\/electronics_materials<\/a>> # Electronics--Materials<\/span>\n\u00A0\u00A0\u00A0\u00A0a \nschema:Intangible<\/a> ;\u00A0\u00A0\u00A0\nrdfs:seeAlso<\/a> <http:\/\/id.loc.gov\/authorities\/subjects\/sh2008102950<\/a>> ;\u00A0\u00A0\u00A0\nschema:name<\/a> \"Electronics--Materials<\/span>\"@en<\/a> ;\u00A0\u00A0\u00A0\u00A0.\n\n\n<\/div>\n
<http:\/\/experiment.worldcat.org\/entity\/work\/data\/4620662#Topic\/plasma_engineering<\/a>> # Plasma engineering<\/span>\n\u00A0\u00A0\u00A0\u00A0a \nschema:Intangible<\/a> ;\u00A0\u00A0\u00A0\nrdfs:seeAlso<\/a> <http:\/\/id.loc.gov\/authorities\/subjects\/sh2010106562<\/a>> ;\u00A0\u00A0\u00A0\nschema:name<\/a> \"Plasma engineering<\/span>\"@en<\/a> ;\u00A0\u00A0\u00A0\u00A0.\n\n\n<\/div>\n
<http:\/\/experiment.worldcat.org\/entity\/work\/data\/4620662#Topic\/plasma_etching<\/a>> # Plasma etching<\/span>\n\u00A0\u00A0\u00A0\u00A0a \nschema:Intangible<\/a> ;\u00A0\u00A0\u00A0\nrdfs:seeAlso<\/a> <http:\/\/id.loc.gov\/authorities\/subjects\/sh2010106195<\/a>> ;\u00A0\u00A0\u00A0\nschema:name<\/a> \"Plasma etching<\/span>\"@en<\/a> ;\u00A0\u00A0\u00A0\u00A0.\n\n\n<\/div>\n
<http:\/\/id.loc.gov\/vocabulary\/countries\/pau<\/a>>\u00A0\u00A0\u00A0\u00A0a \nschema:Place<\/a> ;\u00A0\u00A0\u00A0\ndcterms:identifier<\/a> \"pau<\/span>\" ;\u00A0\u00A0\u00A0\u00A0.\n\n\n<\/div>\n
<http:\/\/id.worldcat.org\/fast\/1066322<\/a>> # Plasma engineering<\/span>\n\u00A0\u00A0\u00A0\u00A0a \nschema:Intangible<\/a> ;\u00A0\u00A0\u00A0\nschema:name<\/a> \"Plasma engineering<\/span>\"@en<\/a> ;\u00A0\u00A0\u00A0\u00A0.\n\n\n<\/div>\n
<http:\/\/id.worldcat.org\/fast\/1066327<\/a>> # Plasma etching<\/span>\n\u00A0\u00A0\u00A0\u00A0a \nschema:Intangible<\/a> ;\u00A0\u00A0\u00A0\nschema:name<\/a> \"Plasma etching<\/span>\"@en<\/a> ;\u00A0\u00A0\u00A0\u00A0.\n\n\n<\/div>\n
<http:\/\/id.worldcat.org\/fast\/907562<\/a>> # Electronics--Materials<\/span>\n\u00A0\u00A0\u00A0\u00A0a \nschema:Intangible<\/a> ;\u00A0\u00A0\u00A0\nschema:name<\/a> \"Electronics--Materials<\/span>\"@en<\/a> ;\u00A0\u00A0\u00A0\u00A0.\n\n\n<\/div>\n
<http:\/\/journals.cambridge.org\/mrsopl_38<\/a>>\u00A0\u00A0\u00A0\nrdfs:comment<\/a> \"Available through MRS Online Proceedings Library<\/span>\" ;\u00A0\u00A0\u00A0\u00A0.\n\n\n<\/div>\n
<http:\/\/viaf.org\/viaf\/30956163<\/a>> # B. Abeles<\/span>\n\u00A0\u00A0\u00A0\u00A0a \nschema:Person<\/a> ;\u00A0\u00A0\u00A0\nschema:familyName<\/a> \"Abeles<\/span>\" ;\u00A0\u00A0\u00A0\nschema:givenName<\/a> \"B.<\/span>\" ;\u00A0\u00A0\u00A0\nschema:name<\/a> \"B. Abeles<\/span>\" ;\u00A0\u00A0\u00A0\u00A0.\n\n\n<\/div>\n
<http:\/\/viaf.org\/viaf\/55452443<\/a>> # Robert Pang Heng Chang<\/span>\n\u00A0\u00A0\u00A0\u00A0a \nschema:Person<\/a> ;\u00A0\u00A0\u00A0\nschema:birthDate<\/a> \"1941<\/span>\" ;\u00A0\u00A0\u00A0\nschema:familyName<\/a> \"Chang<\/span>\" ;\u00A0\u00A0\u00A0\nschema:givenName<\/a> \"Robert Pang Heng<\/span>\" ;\u00A0\u00A0\u00A0\nschema:givenName<\/a> \"R. P. H.<\/span>\" ;\u00A0\u00A0\u00A0\nschema:name<\/a> \"Robert Pang Heng Chang<\/span>\" ;\u00A0\u00A0\u00A0\u00A0.\n\n\n<\/div>\n
<http:\/\/worldcat.org\/isbn\/9780931837036<\/a>>\u00A0\u00A0\u00A0\u00A0a \nschema:ProductModel<\/a> ;\u00A0\u00A0\u00A0\nschema:isbn<\/a> \"0931837030<\/span>\" ;\u00A0\u00A0\u00A0\nschema:isbn<\/a> \"9780931837036<\/span>\" ;\u00A0\u00A0\u00A0\u00A0.\n\n\n<\/div>\n
<http:\/\/www.worldcat.org\/oclc\/654671618<\/a>>\u00A0\u00A0\u00A0\u00A0a \nschema:CreativeWork<\/a> ;\u00A0\u00A0\u00A0\nrdfs:label<\/a> \"Plasma synthesis and etching of electronic materials.<\/span>\" ;\u00A0\u00A0\u00A0\nschema:description<\/a> \"Online version:<\/span>\" ;\u00A0\u00A0\u00A0\nschema:isSimilarTo<\/a> <http:\/\/www.worldcat.org\/oclc\/11784552<\/a>> ; # Plasma synthesis and etching of electronic materials : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.<\/span>\n\u00A0\u00A0\u00A0\u00A0.\n\n\n<\/div>\n
<http:\/\/www.worldcat.org\/title\/-\/oclc\/11784552<\/a>>\u00A0\u00A0\u00A0\u00A0a \ngenont:InformationResource<\/a>, genont:ContentTypeGenericResource<\/a> ;\u00A0\u00A0\u00A0\nschema:about<\/a> <http:\/\/www.worldcat.org\/oclc\/11784552<\/a>> ; # Plasma synthesis and etching of electronic materials : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.<\/span>\n\u00A0\u00A0\u00A0\nschema:dateModified<\/a> \"2019-03-22<\/span>\" ;\u00A0\u00A0\u00A0\nvoid:inDataset<\/a> <http:\/\/purl.oclc.org\/dataset\/WorldCat<\/a>> ;\u00A0\u00A0\u00A0\u00A0.\n\n\n<\/div>\n
<http:\/\/www.worldcat.org\/title\/-\/oclc\/11784552#PublicationEvent\/pittsburgh_pa_materials_research_society_1985<\/a>>\u00A0\u00A0\u00A0\u00A0a \nschema:PublicationEvent<\/a> ;\u00A0\u00A0\u00A0\nschema:location<\/a> <http:\/\/experiment.worldcat.org\/entity\/work\/data\/4620662#Place\/pittsburgh_pa<\/a>> ; # Pittsburgh, Pa.<\/span>\n\u00A0\u00A0\u00A0\nschema:organizer<\/a> <http:\/\/experiment.worldcat.org\/entity\/work\/data\/4620662#Agent\/materials_research_society<\/a>> ; # Materials Research Society<\/span>\n\u00A0\u00A0\u00A0\u00A0.\n\n\n<\/div>\n\n

Content-negotiable representations<\/p>\n