Polycrystalline silicon for integrated circuits and displays (Book, 1998) [WorldCat.org]
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Polycrystalline silicon for integrated circuits and displays

Author: Theodore I Kamins
Publisher: Boston : Kluwer Academic Publishers, ©1998.
Edition/Format:   Print book : English : 2nd edView all editions and formats
Summary:

Polycrystalline Silicon for Integrated Circuits and Displays, Second Edition presents much of the available knowledge about polysilicon.

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Material Type: Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: Theodore I Kamins
ISBN: 0792382242 9780792382249
OCLC Number: 39307393
Description: xv, 378 pages : illustrations ; 25 cm
Contents: 1. Deposition --
2. Structure --
3. Dopant Diffusion and Segregation --
4. Oxidation --
5. Electrical Properties --
6. Applications
Responsibility: by Ted Kamins.
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