skip to content
Proceedings of the Fifth Symposium on Plasma Processing Preview this item
ClosePreview this item
Checking...

Proceedings of the Fifth Symposium on Plasma Processing

Author: G S Mathad; G C Schwartz; G Smolinsky
Publisher: Pennington, NJ (10 S. Main St., Pennington 08534-2896) : Dielectrics and Insulation and Electronics Divisions, Electrochemical Society, ©1985.
Series: Proceedings (Electrochemical Society), v. 85-1.
Edition/Format:   Print book : Conference publication : English
Rating:

(not yet rated) 0 with reviews - Be the first.

Subjects
More like this

Find a copy online

Links to this item

Find a copy in the library

&AllPage.SpinnerRetrieving; Finding libraries that hold this item...

Details

Genre/Form: Conference papers and proceedings
Congresses
Material Type: Conference publication, Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: G S Mathad; G C Schwartz; G Smolinsky
OCLC Number: 11991009
Description: x, 619 pages : illustrations ; 23 cm.
Series Title: Proceedings (Electrochemical Society), v. 85-1.
Responsibility: edited by G.S. Mathad, G.C. Schwartz, G. Smolinsky.

Reviews

User-contributed reviews
Retrieving GoodReads reviews...
Retrieving DOGObooks reviews...

Tags

Be the first.
Confirm this request

You may have already requested this item. Please select Ok if you would like to proceed with this request anyway.

Linked Data


Primary Entity

<http://www.worldcat.org/oclc/11991009> # Proceedings of the Fifth Symposium on Plasma Processing
    a schema:Book, schema:CreativeWork ;
   library:oclcnum "11991009" ;
   library:placeOfPublication <http://experiment.worldcat.org/entity/work/data/1073616712#Place/pennington_nj_10_s_main_st_pennington_08534_2896> ; # Pennington, NJ (10 S. Main St., Pennington 08534-2896)
   library:placeOfPublication <http://id.loc.gov/vocabulary/countries/nju> ;
   schema:about <http://id.worldcat.org/fast/1112219> ; # Semiconductors--Etching
   schema:about <http://experiment.worldcat.org/entity/work/data/1073616712#Topic/plasma_etching_congresses> ; # Plasma etching--Congresses
   schema:about <http://id.worldcat.org/fast/1066327> ; # Plasma etching
   schema:about <http://experiment.worldcat.org/entity/work/data/1073616712#Topic/plasma_etching> ; # Plasma etching
   schema:about <http://experiment.worldcat.org/entity/work/data/1073616712#Topic/semiconductors_etching_congresses> ; # Semiconductors--Etching--Congresses
   schema:about <http://experiment.worldcat.org/entity/work/data/1073616712#Topic/semiconductors_etching> ; # Semiconductors--Etching
   schema:about <http://dewey.info/class/621.38152/e19/> ;
   schema:bookFormat bgn:PrintBook ;
   schema:contributor <http://viaf.org/viaf/53050369> ; # G. C. Schwartz
   schema:contributor <http://viaf.org/viaf/50588047> ; # G. Smolinsky
   schema:contributor <http://viaf.org/viaf/35810970> ; # G. S. Mathad
   schema:copyrightYear "1985" ;
   schema:creator <http://experiment.worldcat.org/entity/work/data/1073616712#Meeting/symposium_on_plasma_processing_5th_1984_new_orleans_la> ; # Symposium on Plasma Processing (5th : 1984 : New Orleans, La.)
   schema:datePublished "1985" ;
   schema:exampleOfWork <http://worldcat.org/entity/work/id/1073616712> ;
   schema:genre "Conference papers and proceedings"@en ;
   schema:genre "Conference publication"@en ;
   schema:inLanguage "en" ;
   schema:isPartOf <http://experiment.worldcat.org/entity/work/data/1073616712#Series/proceedings_electrochemical_society> ; # Proceedings (Electrochemical Society) ;
   schema:name "Proceedings of the Fifth Symposium on Plasma Processing"@en ;
   schema:productID "11991009" ;
   schema:publication <http://www.worldcat.org/title/-/oclc/11991009#PublicationEvent/pennington_nj_10_s_main_st_pennington_08534_2896_dielectrics_and_insulation_and_electronics_divisions_electrochemical_society_1985> ;
   schema:publisher <http://experiment.worldcat.org/entity/work/data/1073616712#Agent/dielectrics_and_insulation_and_electronics_divisions_electrochemical_society> ; # Dielectrics and Insulation and Electronics Divisions, Electrochemical Society
   schema:url <http://www.gbv.de/dms/tib-ub-hannover/128971134.pdf> ;
   wdrs:describedby <http://www.worldcat.org/title/-/oclc/11991009> ;
    .


Related Entities

<http://experiment.worldcat.org/entity/work/data/1073616712#Agent/dielectrics_and_insulation_and_electronics_divisions_electrochemical_society> # Dielectrics and Insulation and Electronics Divisions, Electrochemical Society
    a bgn:Agent ;
   schema:name "Dielectrics and Insulation and Electronics Divisions, Electrochemical Society" ;
    .

<http://experiment.worldcat.org/entity/work/data/1073616712#Meeting/symposium_on_plasma_processing_5th_1984_new_orleans_la> # Symposium on Plasma Processing (5th : 1984 : New Orleans, La.)
    a bgn:Meeting, schema:Event ;
   schema:location <http://experiment.worldcat.org/entity/work/data/1073616712#Place/new_orleans_la> ; # New Orleans, La.)
   schema:name "Symposium on Plasma Processing (5th : 1984 : New Orleans, La.)" ;
    .

<http://experiment.worldcat.org/entity/work/data/1073616712#Place/new_orleans_la> # New Orleans, La.)
    a schema:Place ;
   schema:name "New Orleans, La.)" ;
    .

<http://experiment.worldcat.org/entity/work/data/1073616712#Place/pennington_nj_10_s_main_st_pennington_08534_2896> # Pennington, NJ (10 S. Main St., Pennington 08534-2896)
    a schema:Place ;
   schema:name "Pennington, NJ (10 S. Main St., Pennington 08534-2896)" ;
    .

<http://experiment.worldcat.org/entity/work/data/1073616712#Series/proceedings_electrochemical_society> # Proceedings (Electrochemical Society) ;
    a bgn:PublicationSeries ;
   schema:hasPart <http://www.worldcat.org/oclc/11991009> ; # Proceedings of the Fifth Symposium on Plasma Processing
   schema:name "Proceedings (Electrochemical Society) ;" ;
   schema:name "Proceedings / Electrochemical Society ;" ;
    .

<http://experiment.worldcat.org/entity/work/data/1073616712#Topic/plasma_etching_congresses> # Plasma etching--Congresses
    a schema:Intangible ;
   schema:name "Plasma etching--Congresses"@en ;
    .

<http://experiment.worldcat.org/entity/work/data/1073616712#Topic/semiconductors_etching_congresses> # Semiconductors--Etching--Congresses
    a schema:Intangible ;
   schema:name "Semiconductors--Etching--Congresses"@en ;
    .

<http://id.worldcat.org/fast/1066327> # Plasma etching
    a schema:Intangible ;
   schema:name "Plasma etching"@en ;
    .

<http://id.worldcat.org/fast/1112219> # Semiconductors--Etching
    a schema:Intangible ;
   schema:name "Semiconductors--Etching"@en ;
    .

<http://viaf.org/viaf/35810970> # G. S. Mathad
    a schema:Person ;
   schema:familyName "Mathad" ;
   schema:givenName "G. S." ;
   schema:name "G. S. Mathad" ;
    .

<http://viaf.org/viaf/50588047> # G. Smolinsky
    a schema:Person ;
   schema:familyName "Smolinsky" ;
   schema:givenName "G." ;
   schema:name "G. Smolinsky" ;
    .

<http://viaf.org/viaf/53050369> # G. C. Schwartz
    a schema:Person ;
   schema:familyName "Schwartz" ;
   schema:givenName "G. C." ;
   schema:name "G. C. Schwartz" ;
    .


Content-negotiable representations

Close Window

Please sign in to WorldCat 

Don't have an account? You can easily create a free account.