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A review : ultrahigh-vacuum technology for electron microscopes

Author: Nagamitsu Yoshimura
Publisher: London : Academic Press, 2020.
Edition/Format:   eBook : Document : EnglishView all editions and formats
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Genre/Form: Electronic books
Additional Physical Format: (OCoLC)1109781379
Material Type: Document, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Nagamitsu Yoshimura
ISBN: 9780128197035 012819703X
OCLC Number: 1141514098
Notes: Includes index.
Description: 1 online resource
Contents: 1. Phenomena Induced by Fine Electron-Probe Irradiation2. Electron Induced Gas Desorption3. Microdischarges in High Vacuum4. Sputter-Ion Pump (SIP) for Extreme-High-Vacuum Use5. Development of Diffusion Pump (DP) System for Electron Microscopes
Responsibility: Nagamitsu Yoshimura.

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