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Semiconductor factory and equipment clock synchronization for e-manufacturing

Author: Ya-Shian Li; Brad Van Eck; Electronic and Electrical Engineering Laboratory (National Institute of Standards and Technology); International SEMATECH.
Publisher: [Gaithersburg, Md.] : U.S. Dept. of Commerce, National Institute of Standards and Technology, [2004]
Series: NISTIR, 7184.
Edition/Format:   eBook : Document : National government publication : EnglishView all editions and formats
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Material Type: Document, Government publication, National government publication, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Ya-Shian Li; Brad Van Eck; Electronic and Electrical Engineering Laboratory (National Institute of Standards and Technology); International SEMATECH.
OCLC Number: 123904078
Notes: "December 2004."
Title from page [1], viewed March 15, 2007.
Description: 27 pages (1 digital, PDF file) : illustrations.
Details: Mode of access: World Wide Web.
Series Title: NISTIR, 7184.
Responsibility: Ya-Shian Li, Brad Van Eck.

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