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Semiconductor manufacturing handbook

Author: Hwaiyu Geng
Publisher: New York : McGraw-Hill Education, [2018] ©2018
Edition/Format:   Print book : English : Second editionView all editions and formats
Summary:
Written by 70 international experts and reviewed by a seasoned technical advisory board, this fully updated resource clearly explains the cutting-edge processes used in the design and fabrication of IC chips, MEMS, sensors, and other electronic devices. Semiconductor Manufacturing Handbook, Second Edition, covers the emerging technologies that enable the Internet of Things, the Industrial Internet of Things, data  Read more...
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Genre/Form: Handbooks and manuals
Handbooks, manuals, etc
Document Type: Book
All Authors / Contributors: Hwaiyu Geng
ISBN: 9781259587696 125958769X
OCLC Number: 1005097007
Description: xxxi, 525 pages : illustrations ; 27 cm
Contents: Part 1 : Semiconductor Manufacturing Fundamentals. Semiconductor Manufacturing, the Internet of Things, and Sustainability / Hwaiyu Geng --
Nanotechnology and Nanomanufacturing : From Silicon to New Carbon-Based Materials and Beyond / Michael A. Huff --
Fundamentals of FinFET and Recent Advances in Nanoscale Silicide Formation / L.P. Ren, Yi-Chia Chou, and K.N. Tu --
Foundations of Microsystems Manufacturing : An Empowering Technology for the IoT / Michael A. Huff --
Physical Design for High-Performance, Low-Power, and Reliable 3D Integrated Circuits / Ankur Srivastava --
Part 2 : Front-End-of-Line Processes. Epitaxy / Jamal Ramdani --
Thermal Processing : Anneals, RTP, and Oxidation / David L. O'Meara --
Microlithography / Chris A. Mack --
Etching / Nandita DasGupta --
Ion Implantation / Bo Vanderberg --
Introduction to Physical Vapor Deposition / Florian Solzbacher --
Chemical Vapor Deposition / Bin Dong, M. Sky Driver, and Jeffry A. Kelber --
Atomic Layer Deposition / Eric T. Eisenbraun --
Electrochemical Deposition / John Klocke --
Fundamentals of Chemical Mechanical Planarization / Gautam Banerjee --
AFM Metrology / Ardavan Zandiatashbar --
Part 3 : Back-End-of-Line Processes. Wafer Thinning and Singulation / Youngsuk Kim [and 3 others] --
Packaging / Michael Töpper and Dietrich Tönnies --
Bonding Fundamentals / Ivy Qin --
Interconnects Reliability / Roey Shaviv --
Automatic Test Equipment / A.T. Sivaram --
Part 4 : Technologies for Flexible Hybrid Electronics and Large-Area Electronics. Printed Electronics : Principles, Materials, Processes, and Applications / Kan Wang [and 3 others] --
Flexible Hybrid Electronics / Rich Chaney --
Flexible Electronics / Dan Xie and Yilin Sun --
RF Printed Electronics : Communication, Sensing, and Energy Harvesting for the Internet of Things and Smart Skin Applications / Bijan K. Tehrani and Manos (Emmanouil) M. Tentzeris --
Printing of Nanoscale Electronics and Power Electronics / Cihan Yilmaz and Ahmed Busnaina --
3D Interconnects in Flexible Electronics / Cihan Yilmaz and Ahmed Busnaina --
Materials for the Manufacturing of an Inkjet Printed Touch Sensor / Nesrine Kammoun, Christian Renninger, and Norbert Fruehauf --
Flat-Panel and Flexible Display Technology / Cheng-Chung Lee [and 3 others] --
Photovoltaics Fundamentals, Manufacturing, Installation, and Operations / Jun Zhuge --
Part 5 : Process Gases and Chemicals. Gas Distribution Systems / Kenneth Grosser, James McAndrew, and Tracey Jacksier --
Fundamentals of Ultrapure Water / Vyacheslay (Slava) Libman --
Process Chemicals, Handling, and Abatement / Daniel Fuchs --
Filtration / Barry Gotlinsky --
Chemical and Slurry Handling Systems / Kristin Cavicchi --
Part 6 : Operations, Equipment, and Facilities. Yield Management / Dieter Rathei --
CIM and Factory Automation / Clint Harris --
MES Fundamentals / Julie Fraser --
Advanced Process Control / Raymond van Roijen --
Airborne Molecular Contamination / Chris Muller --
ESD Controls in Cleanroom Environments / Larry Levit --
Vacuum Systems / Michael R. Czerniak --
Control of RF Plasma Processing / David J. Coumou --
IC Manufacturing Equipment Parts Cleaning Technology : Fundamentals and Applications / Ardeshir J. Sidhwa --
Equipment Design Challenges due to Increasing Hazards and Regulations / Mark Fessler --
Cleanroom Design and Construction / Richard V. Pavlotsky --
Vibration and Noise Design / Michael Gendreau.
Responsibility: Hwaiyu Geng [editor].

Abstract:

Fully updated, state-of-the-art semiconductor design and manufacturing information  Read more...

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Primary Entity

<http://www.worldcat.org/oclc/1005097007> # Semiconductor manufacturing handbook
    a schema:CreativeWork, schema:Book ;
    library:oclcnum "1005097007" ;
    library:placeOfPublication <http://id.loc.gov/vocabulary/countries/nyu> ;
    schema:about <http://experiment.worldcat.org/entity/work/data/1044580299#Topic/semiconductors_design_and_construction> ; # Semiconductors--Design and construction
    schema:about <http://experiment.worldcat.org/entity/work/data/1044580299#Topic/integrated_circuits_design_and_construction> ; # Integrated circuits--Design and construction
    schema:about <http://dewey.info/class/621.38152/e23/> ;
    schema:bookEdition "Second edition." ;
    schema:bookFormat bgn:PrintBook ;
    schema:copyrightYear "2018" ;
    schema:datePublished "2018" ;
    schema:description "Part 1 : Semiconductor Manufacturing Fundamentals. Semiconductor Manufacturing, the Internet of Things, and Sustainability / Hwaiyu Geng -- Nanotechnology and Nanomanufacturing : From Silicon to New Carbon-Based Materials and Beyond / Michael A. Huff -- Fundamentals of FinFET and Recent Advances in Nanoscale Silicide Formation / L.P. Ren, Yi-Chia Chou, and K.N. Tu -- Foundations of Microsystems Manufacturing : An Empowering Technology for the IoT / Michael A. Huff -- Physical Design for High-Performance, Low-Power, and Reliable 3D Integrated Circuits / Ankur Srivastava -- Part 2 : Front-End-of-Line Processes. Epitaxy / Jamal Ramdani -- Thermal Processing : Anneals, RTP, and Oxidation / David L. O'Meara -- Microlithography / Chris A. Mack -- Etching / Nandita DasGupta -- Ion Implantation / Bo Vanderberg -- Introduction to Physical Vapor Deposition / Florian Solzbacher -- Chemical Vapor Deposition / Bin Dong, M. Sky Driver, and Jeffry A. Kelber -- Atomic Layer Deposition / Eric T. Eisenbraun -- Electrochemical Deposition / John Klocke -- Fundamentals of Chemical Mechanical Planarization / Gautam Banerjee -- AFM Metrology / Ardavan Zandiatashbar -- Part 3 : Back-End-of-Line Processes. Wafer Thinning and Singulation / Youngsuk Kim [and 3 others] -- Packaging / Michael Töpper and Dietrich Tönnies -- Bonding Fundamentals / Ivy Qin -- Interconnects Reliability / Roey Shaviv -- Automatic Test Equipment / A.T. Sivaram -- Part 4 : Technologies for Flexible Hybrid Electronics and Large-Area Electronics. Printed Electronics : Principles, Materials, Processes, and Applications / Kan Wang [and 3 others] -- Flexible Hybrid Electronics / Rich Chaney -- Flexible Electronics / Dan Xie and Yilin Sun -- RF Printed Electronics : Communication, Sensing, and Energy Harvesting for the Internet of Things and Smart Skin Applications / Bijan K. Tehrani and Manos (Emmanouil) M. Tentzeris -- Printing of Nanoscale Electronics and Power Electronics / Cihan Yilmaz and Ahmed Busnaina -- 3D Interconnects in Flexible Electronics / Cihan Yilmaz and Ahmed Busnaina -- Materials for the Manufacturing of an Inkjet Printed Touch Sensor / Nesrine Kammoun, Christian Renninger, and Norbert Fruehauf -- Flat-Panel and Flexible Display Technology / Cheng-Chung Lee [and 3 others] -- Photovoltaics Fundamentals, Manufacturing, Installation, and Operations / Jun Zhuge -- Part 5 : Process Gases and Chemicals. Gas Distribution Systems / Kenneth Grosser, James McAndrew, and Tracey Jacksier -- Fundamentals of Ultrapure Water / Vyacheslay (Slava) Libman -- Process Chemicals, Handling, and Abatement / Daniel Fuchs -- Filtration / Barry Gotlinsky -- Chemical and Slurry Handling Systems / Kristin Cavicchi -- Part 6 : Operations, Equipment, and Facilities. Yield Management / Dieter Rathei -- CIM and Factory Automation / Clint Harris -- MES Fundamentals / Julie Fraser -- Advanced Process Control / Raymond van Roijen -- Airborne Molecular Contamination / Chris Muller -- ESD Controls in Cleanroom Environments / Larry Levit -- Vacuum Systems / Michael R. Czerniak -- Control of RF Plasma Processing / David J. Coumou -- IC Manufacturing Equipment Parts Cleaning Technology : Fundamentals and Applications / Ardeshir J. Sidhwa -- Equipment Design Challenges due to Increasing Hazards and Regulations / Mark Fessler -- Cleanroom Design and Construction / Richard V. Pavlotsky -- Vibration and Noise Design / Michael Gendreau."@en ;
    schema:description "Written by 70 international experts and reviewed by a seasoned technical advisory board, this fully updated resource clearly explains the cutting-edge processes used in the design and fabrication of IC chips, MEMS, sensors, and other electronic devices. Semiconductor Manufacturing Handbook, Second Edition, covers the emerging technologies that enable the Internet of Things, the Industrial Internet of Things, data analytics, artificial intelligence, augmented reality, and and smart manufacturing. You will get complete details on semiconductor fundamentals, front- and back-end processes, nanotechnology, photovoltaics, gases and chemicals, fab yield, and operations and facilities -- Provided by the publisher."@en ;
    schema:editor <http://experiment.worldcat.org/entity/work/data/1044580299#Person/geng_hwaiyu> ; # Hwaiyu Geng
    schema:exampleOfWork <http://worldcat.org/entity/work/id/1044580299> ;
    schema:genre "Handbooks and manuals"@en ;
    schema:inLanguage "en" ;
    schema:name "Semiconductor manufacturing handbook"@en ;
    schema:productID "1005097007" ;
    schema:workExample <http://worldcat.org/isbn/9781259587696> ;
    wdrs:describedby <http://www.worldcat.org/title/-/oclc/1005097007> ;
    .


Related Entities

<http://experiment.worldcat.org/entity/work/data/1044580299#Person/geng_hwaiyu> # Hwaiyu Geng
    a schema:Person ;
    schema:familyName "Geng" ;
    schema:givenName "Hwaiyu" ;
    schema:name "Hwaiyu Geng" ;
    .

<http://experiment.worldcat.org/entity/work/data/1044580299#Topic/integrated_circuits_design_and_construction> # Integrated circuits--Design and construction
    a schema:Intangible ;
    schema:name "Integrated circuits--Design and construction"@en ;
    .

<http://experiment.worldcat.org/entity/work/data/1044580299#Topic/semiconductors_design_and_construction> # Semiconductors--Design and construction
    a schema:Intangible ;
    schema:name "Semiconductors--Design and construction"@en ;
    .

<http://worldcat.org/isbn/9781259587696>
    a schema:ProductModel ;
    schema:isbn "125958769X" ;
    schema:isbn "9781259587696" ;
    .


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