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Semiconductor manufacturing technology

Author: Chue San Yoo
Publisher: Hackensack, N.J. ; London : World Scientific, ©2008.
Series: Advanced series in electrical and computer engineering, v. 13.
Edition/Format:  Print book : EnglishView all editions and formats
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Document Type: Book
All Authors / Contributors: Chue San Yoo
ISBN: 9789812568236 9812568239
OCLC Number: 1166946642
Description: xii, 470 p. : ill. ; 24 cm.
Series Title: Advanced series in electrical and computer engineering, v. 13.
Responsibility: Chue San Yoo.

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<http:\/\/experiment.worldcat.org\/entity\/work\/data\/103952073#Agent\/world_scientific<\/a>> # World Scientific<\/span>\n\u00A0\u00A0\u00A0\u00A0a \nbgn:Agent<\/a> ;\u00A0\u00A0\u00A0\nschema:name<\/a> \"World Scientific<\/span>\" ;\u00A0\u00A0\u00A0\u00A0.\n\n\n<\/div>\n
<http:\/\/experiment.worldcat.org\/entity\/work\/data\/103952073#Person\/yoo_chue_san<\/a>> # Chue San Yoo<\/span>\n\u00A0\u00A0\u00A0\u00A0a \nschema:Person<\/a> ;\u00A0\u00A0\u00A0\nschema:familyName<\/a> \"Yoo<\/span>\" ;\u00A0\u00A0\u00A0\nschema:givenName<\/a> \"Chue San<\/span>\" ;\u00A0\u00A0\u00A0\nschema:name<\/a> \"Chue San Yoo<\/span>\" ;\u00A0\u00A0\u00A0\u00A0.\n\n\n<\/div>\n
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<http:\/\/experiment.worldcat.org\/entity\/work\/data\/103952073#Topic\/semiconductors_design_and_construction<\/a>> # Semiconductors--Design and construction<\/span>\n\u00A0\u00A0\u00A0\u00A0a \nschema:Intangible<\/a> ;\u00A0\u00A0\u00A0\nschema:name<\/a> \"Semiconductors--Design and construction<\/span>\"@en<\/a> ;\u00A0\u00A0\u00A0\u00A0.\n\n\n<\/div>\n
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<http:\/\/worldcat.org\/isbn\/9789812568236<\/a>>\u00A0\u00A0\u00A0\u00A0a \nschema:ProductModel<\/a> ;\u00A0\u00A0\u00A0\nschema:isbn<\/a> \"9812568239<\/span>\" ;\u00A0\u00A0\u00A0\nschema:isbn<\/a> \"9789812568236<\/span>\" ;\u00A0\u00A0\u00A0\u00A0.\n\n\n<\/div>\n
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<http:\/\/www.worldcat.org\/title\/-\/oclc\/1166946642#PublicationEvent\/hackensack_n_j_london_world_scientific_c2008<\/a>>\u00A0\u00A0\u00A0\u00A0a \nschema:PublicationEvent<\/a> ;\u00A0\u00A0\u00A0\nschema:location<\/a> <http:\/\/dbpedia.org\/resource\/London<\/a>> ; # London<\/span>\n\u00A0\u00A0\u00A0\nschema:location<\/a> <http:\/\/experiment.worldcat.org\/entity\/work\/data\/103952073#Place\/hackensack_n_j<\/a>> ; # Hackensack, N.J.<\/span>\n\u00A0\u00A0\u00A0\nschema:organizer<\/a> <http:\/\/experiment.worldcat.org\/entity\/work\/data\/103952073#Agent\/world_scientific<\/a>> ; # World Scientific<\/span>\n\u00A0\u00A0\u00A0\nschema:startDate<\/a> \"c2008<\/span>\" ;\u00A0\u00A0\u00A0\u00A0.\n\n\n<\/div>\n\n

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