skip to content
Semiconductor manufacturing technology Preview this item
ClosePreview this item
Checking...

Semiconductor manufacturing technology

Author: Chue San Yoo
Publisher: Hackensack, N.J. ; London : World Scientific, ©2008.
Series: Advanced series in electrical and computer engineering, v. 13.
Edition/Format:   Print book : EnglishView all editions and formats
Rating:

(not yet rated) 0 with reviews - Be the first.

Subjects
More like this

Find a copy in the library

&AllPage.SpinnerRetrieving; Finding libraries that hold this item...

Details

Document Type: Book
All Authors / Contributors: Chue San Yoo
ISBN: 9789812568236 9812568239
OCLC Number: 1166946642
Description: xii, 470 p. : ill. ; 24 cm.
Series Title: Advanced series in electrical and computer engineering, v. 13.
Responsibility: Chue San Yoo.

Reviews

User-contributed reviews
Retrieving GoodReads reviews...
Retrieving DOGObooks reviews...

Tags

Be the first.
Confirm this request

You may have already requested this item. Please select Ok if you would like to proceed with this request anyway.

Linked Data


\n\n

Primary Entity<\/h3>\n
<http:\/\/www.worldcat.org\/oclc\/1166946642<\/a>> # Semiconductor manufacturing technology<\/span>\n\u00A0\u00A0\u00A0\u00A0a \nschema:CreativeWork<\/a>, schema:Book<\/a> ;\u00A0\u00A0\u00A0\nlibrary:oclcnum<\/a> \"1166946642<\/span>\" ;\u00A0\u00A0\u00A0\nlibrary:placeOfPublication<\/a> <http:\/\/id.loc.gov\/vocabulary\/countries\/nju<\/a>> ;\u00A0\u00A0\u00A0\nlibrary:placeOfPublication<\/a> <http:\/\/experiment.worldcat.org\/entity\/work\/data\/103952073#Place\/hackensack_n_j<\/a>> ; # Hackensack, N.J.<\/span>\n\u00A0\u00A0\u00A0\nlibrary:placeOfPublication<\/a> <http:\/\/dbpedia.org\/resource\/London<\/a>> ; # London<\/span>\n\u00A0\u00A0\u00A0\nschema:about<\/a> <http:\/\/experiment.worldcat.org\/entity\/work\/data\/103952073#Topic\/semiconductor_industry<\/a>> ; # Semiconductor industry<\/span>\n\u00A0\u00A0\u00A0\nschema:about<\/a> <http:\/\/experiment.worldcat.org\/entity\/work\/data\/103952073#Topic\/semiconductors_design_and_construction<\/a>> ; # Semiconductors--Design and construction<\/span>\n\u00A0\u00A0\u00A0\nschema:bookFormat<\/a> bgn:PrintBook<\/a> ;\u00A0\u00A0\u00A0\nschema:copyrightYear<\/a> \"2008<\/span>\" ;\u00A0\u00A0\u00A0\nschema:creator<\/a> <http:\/\/experiment.worldcat.org\/entity\/work\/data\/103952073#Person\/yoo_chue_san<\/a>> ; # Chue San Yoo<\/span>\n\u00A0\u00A0\u00A0\nschema:datePublished<\/a> \"2008<\/span>\" ;\u00A0\u00A0\u00A0\nschema:exampleOfWork<\/a> <http:\/\/worldcat.org\/entity\/work\/id\/103952073<\/a>> ;\u00A0\u00A0\u00A0\nschema:inLanguage<\/a> \"en<\/span>\" ;\u00A0\u00A0\u00A0\nschema:isPartOf<\/a> <http:\/\/experiment.worldcat.org\/entity\/work\/data\/103952073#Series\/advanced_series_in_electrical_and_computer_engineering<\/a>> ; # Advanced series in electrical and computer engineering ;<\/span>\n\u00A0\u00A0\u00A0\nschema:name<\/a> \"Semiconductor manufacturing technology<\/span>\"@en<\/a> ;\u00A0\u00A0\u00A0\nschema:numberOfPages<\/a> \"470<\/span>\" ;\u00A0\u00A0\u00A0\nschema:productID<\/a> \"1166946642<\/span>\" ;\u00A0\u00A0\u00A0\nschema:publication<\/a> <http:\/\/www.worldcat.org\/title\/-\/oclc\/1166946642#PublicationEvent\/hackensack_n_j_london_world_scientific_c2008<\/a>> ;\u00A0\u00A0\u00A0\nschema:publisher<\/a> <http:\/\/experiment.worldcat.org\/entity\/work\/data\/103952073#Agent\/world_scientific<\/a>> ; # World Scientific<\/span>\n\u00A0\u00A0\u00A0\nschema:workExample<\/a> <http:\/\/worldcat.org\/isbn\/9789812568236<\/a>> ;\u00A0\u00A0\u00A0\nwdrs:describedby<\/a> <http:\/\/www.worldcat.org\/title\/-\/oclc\/1166946642<\/a>> ;\u00A0\u00A0\u00A0\u00A0.\n\n\n<\/div>\n\n

Related Entities<\/h3>\n
<http:\/\/dbpedia.org\/resource\/London<\/a>> # London<\/span>\n\u00A0\u00A0\u00A0\u00A0a \nschema:Place<\/a> ;\u00A0\u00A0\u00A0\nschema:name<\/a> \"London<\/span>\" ;\u00A0\u00A0\u00A0\u00A0.\n\n\n<\/div>\n
<http:\/\/experiment.worldcat.org\/entity\/work\/data\/103952073#Agent\/world_scientific<\/a>> # World Scientific<\/span>\n\u00A0\u00A0\u00A0\u00A0a \nbgn:Agent<\/a> ;\u00A0\u00A0\u00A0\nschema:name<\/a> \"World Scientific<\/span>\" ;\u00A0\u00A0\u00A0\u00A0.\n\n\n<\/div>\n
<http:\/\/experiment.worldcat.org\/entity\/work\/data\/103952073#Person\/yoo_chue_san<\/a>> # Chue San Yoo<\/span>\n\u00A0\u00A0\u00A0\u00A0a \nschema:Person<\/a> ;\u00A0\u00A0\u00A0\nschema:familyName<\/a> \"Yoo<\/span>\" ;\u00A0\u00A0\u00A0\nschema:givenName<\/a> \"Chue San<\/span>\" ;\u00A0\u00A0\u00A0\nschema:name<\/a> \"Chue San Yoo<\/span>\" ;\u00A0\u00A0\u00A0\u00A0.\n\n\n<\/div>\n
<http:\/\/experiment.worldcat.org\/entity\/work\/data\/103952073#Place\/hackensack_n_j<\/a>> # Hackensack, N.J.<\/span>\n\u00A0\u00A0\u00A0\u00A0a \nschema:Place<\/a> ;\u00A0\u00A0\u00A0\nschema:name<\/a> \"Hackensack, N.J.<\/span>\" ;\u00A0\u00A0\u00A0\u00A0.\n\n\n<\/div>\n
<http:\/\/experiment.worldcat.org\/entity\/work\/data\/103952073#Series\/advanced_series_in_electrical_and_computer_engineering<\/a>> # Advanced series in electrical and computer engineering ;<\/span>\n\u00A0\u00A0\u00A0\u00A0a \nbgn:PublicationSeries<\/a> ;\u00A0\u00A0\u00A0\nschema:hasPart<\/a> <http:\/\/www.worldcat.org\/oclc\/1166946642<\/a>> ; # Semiconductor manufacturing technology<\/span>\n\u00A0\u00A0\u00A0\nschema:name<\/a> \"Advanced series in electrical and computer engineering ;<\/span>\" ;\u00A0\u00A0\u00A0\u00A0.\n\n\n<\/div>\n
<http:\/\/experiment.worldcat.org\/entity\/work\/data\/103952073#Topic\/semiconductor_industry<\/a>> # Semiconductor industry<\/span>\n\u00A0\u00A0\u00A0\u00A0a \nschema:Intangible<\/a> ;\u00A0\u00A0\u00A0\nschema:name<\/a> \"Semiconductor industry<\/span>\"@en<\/a> ;\u00A0\u00A0\u00A0\u00A0.\n\n\n<\/div>\n
<http:\/\/experiment.worldcat.org\/entity\/work\/data\/103952073#Topic\/semiconductors_design_and_construction<\/a>> # Semiconductors--Design and construction<\/span>\n\u00A0\u00A0\u00A0\u00A0a \nschema:Intangible<\/a> ;\u00A0\u00A0\u00A0\nschema:name<\/a> \"Semiconductors--Design and construction<\/span>\"@en<\/a> ;\u00A0\u00A0\u00A0\u00A0.\n\n\n<\/div>\n
<http:\/\/id.loc.gov\/vocabulary\/countries\/nju<\/a>>\u00A0\u00A0\u00A0\u00A0a \nschema:Place<\/a> ;\u00A0\u00A0\u00A0\ndcterms:identifier<\/a> \"nju<\/span>\" ;\u00A0\u00A0\u00A0\u00A0.\n\n\n<\/div>\n
<http:\/\/worldcat.org\/isbn\/9789812568236<\/a>>\u00A0\u00A0\u00A0\u00A0a \nschema:ProductModel<\/a> ;\u00A0\u00A0\u00A0\nschema:isbn<\/a> \"9812568239<\/span>\" ;\u00A0\u00A0\u00A0\nschema:isbn<\/a> \"9789812568236<\/span>\" ;\u00A0\u00A0\u00A0\u00A0.\n\n\n<\/div>\n
<http:\/\/www.worldcat.org\/title\/-\/oclc\/1166946642<\/a>>\u00A0\u00A0\u00A0\u00A0a \ngenont:InformationResource<\/a>, genont:ContentTypeGenericResource<\/a> ;\u00A0\u00A0\u00A0\nschema:about<\/a> <http:\/\/www.worldcat.org\/oclc\/1166946642<\/a>> ; # Semiconductor manufacturing technology<\/span>\n\u00A0\u00A0\u00A0\nschema:dateModified<\/a> \"2020-10-07<\/span>\" ;\u00A0\u00A0\u00A0\nvoid:inDataset<\/a> <http:\/\/purl.oclc.org\/dataset\/WorldCat<\/a>> ;\u00A0\u00A0\u00A0\u00A0.\n\n\n<\/div>\n
<http:\/\/www.worldcat.org\/title\/-\/oclc\/1166946642#PublicationEvent\/hackensack_n_j_london_world_scientific_c2008<\/a>>\u00A0\u00A0\u00A0\u00A0a \nschema:PublicationEvent<\/a> ;\u00A0\u00A0\u00A0\nschema:location<\/a> <http:\/\/dbpedia.org\/resource\/London<\/a>> ; # London<\/span>\n\u00A0\u00A0\u00A0\nschema:location<\/a> <http:\/\/experiment.worldcat.org\/entity\/work\/data\/103952073#Place\/hackensack_n_j<\/a>> ; # Hackensack, N.J.<\/span>\n\u00A0\u00A0\u00A0\nschema:organizer<\/a> <http:\/\/experiment.worldcat.org\/entity\/work\/data\/103952073#Agent\/world_scientific<\/a>> ; # World Scientific<\/span>\n\u00A0\u00A0\u00A0\nschema:startDate<\/a> \"c2008<\/span>\" ;\u00A0\u00A0\u00A0\u00A0.\n\n\n<\/div>\n\n

Content-negotiable representations<\/p>\n