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Silicium aus der Gasphase : Optimierung der Gasphasenabscheidung von Silicium aus Silan

Author: Michael Hofstätter
Publisher: [S.l.] : [s.n.], 2002.
Dissertation: Bielefeld, Univ, Diss., 2002.
Edition/Format:   Computer file : Thesis/dissertation : GermanView all editions and formats
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Genre/Form: Online-Publikation
Material Type: Thesis/dissertation, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Michael Hofstätter
OCLC Number: 76426899
Description: 1 online resource
Responsibility: von Michael Hofstätter.

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