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Study of Characterization Methods to Evaluate Atomic Layer Deposited Coatings Including the Application on Complex Structures

Author: Barbara Wegler; Bernhard Hensel
Publisher: Erlangen Friedrich-Alexander-Universität Erlangen-Nürnberg (FAU) 2017
Dissertation: Dissertation Erlangen, Friedrich-Alexander-Universität Erlangen-Nürnberg (FAU) 2017
Edition/Format:   Thesis/dissertation : Document : Thesis/dissertation : eBook   Computer File : English
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Material Type: Document, Thesis/dissertation, Internet resource
Document Type: Internet Resource, Computer File
All Authors / Contributors: Barbara Wegler; Bernhard Hensel
OCLC Number: 1003247523
Description: Online-Ressource.
Other Titles: Studie über Charakterisierungsmethoden zur Evaluierung von atomlagenabgeschiedenen Beschichtungen einschließlich der Anwendung auf komplexen Strukturen
Responsibility: Barbara Wegler ; Gutachter: Bernhard Hensel

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