skip to content
The twin epipoly process : a foundry process flow for a microfluidic application kit in silicon/glass Preview this item
ClosePreview this item
Checking...

The twin epipoly process : a foundry process flow for a microfluidic application kit in silicon/glass

Author: Tjalf Pirk
Publisher: Aachen : Shaker, 2008.
Dissertation: Zugl.: Freiburg (Breisgau), Univ., Diss., 2008.
Series: Microfluidics & nanofluidics, Bd. 4.
Edition/Format:   Thesis/dissertation : Thesis/dissertation : English
Rating:

(not yet rated) 0 with reviews - Be the first.

Subjects
More like this

Find a copy online

Links to this item

Find a copy in the library

&AllPage.SpinnerRetrieving; Finding libraries that hold this item...

Details

Material Type: Thesis/dissertation, Internet resource
Document Type: Book, Internet Resource
All Authors / Contributors: Tjalf Pirk
ISBN: 9783832276447 3832276440
OCLC Number: 297544674
Description: VIII, 155 Seiten : Illustrationen, Diagramme ; 24 cm, 284 gr.
Series Title: Microfluidics & nanofluidics, Bd. 4.
Responsibility: Tjalf Pirk.

Reviews

User-contributed reviews
Retrieving GoodReads reviews...
Retrieving DOGObooks reviews...

Tags

Be the first.
Confirm this request

You may have already requested this item. Please select Ok if you would like to proceed with this request anyway.

Linked Data


Primary Entity

<http://www.worldcat.org/oclc/297544674> # The twin epipoly process : a foundry process flow for a microfluidic application kit in silicon/glass
    a schema:CreativeWork, schema:Book, bgn:Thesis ;
   bgn:inSupportOf "Zugl.: Freiburg (Breisgau), Univ., Diss., 2008." ;
   library:oclcnum "297544674" ;
   library:placeOfPublication <http://experiment.worldcat.org/entity/work/data/178686415#Place/aachen> ; # Aachen
   library:placeOfPublication <http://id.loc.gov/vocabulary/countries/gw> ;
   schema:about <http://experiment.worldcat.org/entity/work/data/178686415#Topic/silicium> ; # Silicium
   schema:about <http://experiment.worldcat.org/entity/work/data/178686415#Topic/epitaxieschicht> ; # Epitaxieschicht
   schema:about <http://dewey.info/class/629.8042/e22/ger/> ;
   schema:about <http://experiment.worldcat.org/entity/work/data/178686415#Topic/mikrofluidik_glas_silicium_polykristall_epitaxieschicht_prozesssteuerung> ; # Mikrofluidik--Glas--Silicium--Polykristall--Epitaxieschicht--Prozesssteuerung
   schema:about <http://id.worldcat.org/fast/1736696> ; # Microfluidics
   schema:about <http://experiment.worldcat.org/entity/work/data/178686415#Topic/prozesssteuerung> ; # Prozesssteuerung
   schema:about <http://experiment.worldcat.org/entity/work/data/178686415#Topic/glas> ; # Glas
   schema:about <http://experiment.worldcat.org/entity/work/data/178686415#Topic/polykristall> ; # Polykristall
   schema:about <http://experiment.worldcat.org/entity/work/data/178686415#Topic/mikrofluidik> ; # Mikrofluidik
   schema:author <http://viaf.org/viaf/81101568> ; # Tjalf Pirk
   schema:datePublished "2008" ;
   schema:exampleOfWork <http://worldcat.org/entity/work/id/178686415> ;
   schema:inLanguage "en" ;
   schema:isPartOf <http://experiment.worldcat.org/entity/work/data/178686415#Series/microfluidics_&_nanofluidics> ; # Microfluidics & nanofluidics ;
   schema:name "The twin epipoly process : a foundry process flow for a microfluidic application kit in silicon/glass" ;
   schema:productID "297544674" ;
   schema:publication <http://www.worldcat.org/title/-/oclc/297544674#PublicationEvent/aachen_shaker_2008> ;
   schema:publisher <http://experiment.worldcat.org/entity/work/data/178686415#Agent/shaker> ; # Shaker
   schema:url <http://d-nb.info/991379047/04> ;
   schema:workExample <http://worldcat.org/isbn/9783832276447> ;
   umbel:isLike <http://d-nb.info/991379047> ;
   wdrs:describedby <http://www.worldcat.org/title/-/oclc/297544674> ;
    .


Related Entities

<http://experiment.worldcat.org/entity/work/data/178686415#Series/microfluidics_&_nanofluidics> # Microfluidics & nanofluidics ;
    a bgn:PublicationSeries ;
   schema:hasPart <http://www.worldcat.org/oclc/297544674> ; # The twin epipoly process : a foundry process flow for a microfluidic application kit in silicon/glass
   schema:name "Microfluidics & nanofluidics ;" ;
    .

<http://experiment.worldcat.org/entity/work/data/178686415#Topic/mikrofluidik_glas_silicium_polykristall_epitaxieschicht_prozesssteuerung> # Mikrofluidik--Glas--Silicium--Polykristall--Epitaxieschicht--Prozesssteuerung
    a schema:Intangible ;
   schema:name "Mikrofluidik--Glas--Silicium--Polykristall--Epitaxieschicht--Prozesssteuerung" ;
    .

<http://id.worldcat.org/fast/1736696> # Microfluidics
    a schema:Intangible ;
   schema:name "Microfluidics" ;
    .

<http://viaf.org/viaf/81101568> # Tjalf Pirk
    a schema:Person ;
   schema:familyName "Pirk" ;
   schema:givenName "Tjalf" ;
   schema:name "Tjalf Pirk" ;
    .

<http://worldcat.org/isbn/9783832276447>
    a schema:ProductModel ;
   schema:isbn "3832276440" ;
   schema:isbn "9783832276447" ;
    .

<http://www.worldcat.org/title/-/oclc/297544674>
    a genont:InformationResource, genont:ContentTypeGenericResource ;
   schema:about <http://www.worldcat.org/oclc/297544674> ; # The twin epipoly process : a foundry process flow for a microfluidic application kit in silicon/glass
   schema:dateModified "2018-11-09" ;
   void:inDataset <http://purl.oclc.org/dataset/WorldCat> ;
    .


Content-negotiable representations

Close Window

Please sign in to WorldCat 

Don't have an account? You can easily create a free account.