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A User's guide to ellipsometry

Author: Harland G Tompkins
Publisher: Boston : Academic Press, ©1993.
Edition/Format:   Print book : EnglishView all editions and formats
Summary:

Specifically designed for the user who wants expanded use of ellipsometry beyond the relatively limited number of turn-key applications, this text provides comprehensive discussion of the measurement  Read more...

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Document Type: Book
All Authors / Contributors: Harland G Tompkins
ISBN: 0126939500 9780126939507
OCLC Number: 802416413
Description: XV, 260 p. : gràf. ; 24 cm
Contents: Theoretical aspects; instrumentation; using optical parameters to determine material properties; determining optical parameters for inaccesible substrates and unknown films; extremely thin films; the special case of polysilicon; the effect of roughness; case studies; chapter references.
Responsibility: Harland G. Tompkins.

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